Switchable capacitor

Xavier Rottenberg (Inventor), Henri Jansen (Inventor), Hendrikus Tilmans (Inventor), Walter De Raedt (Inventor)

    Research output: Patent

    5 Downloads (Pure)

    Abstract

    A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom elecrode, a dielaectric layer deposited on at least part of sai bottum electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actiuation area in order to stabilize the down state position of the armature. The device may futhermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area of with relay actuation.
    Original languageEnglish
    Patent numberEP20030020159
    Publication statusSubmitted - 5 Sep 2003

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