Switchable capacitor and method of making the same

Xavier Rottenberg; Henri Jansen; Hendrikus Tilmans; Walter De Raedt

Switchable capacitor and method of making the same

Xavier Rottenberg (Inventor), Henri Jansen (Inventor), Hendrikus Tilmans (Inventor), Walter De Raedt (Inventor)

Research output: Patent

29 Downloads (Pure)

Abstract

A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

Original language	English
Patent number	US20030663340
Publication status	Submitted - 15 Sept 2003

Access to Document

Tilmans_US2004124497Final published version, 3.02 MB

http://v3.espacenet.com/publicationDetails/biblio?DB=EPODOC&adjacent=true&locale=en_EP&FT=D&date=20040701&CC=US&NR=2004124497A1&KC=A1

Cite this

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title = "Switchable capacitor and method of making the same",

abstract = "A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.",

author = "Xavier Rottenberg and Henri Jansen and Hendrikus Tilmans and {De Raedt}, Walter",

year = "2003",

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day = "15",

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TY - PAT

T1 - Switchable capacitor and method of making the same

AU - Rottenberg, Xavier

AU - Jansen, Henri

AU - Tilmans, Hendrikus

AU - De Raedt, Walter

PY - 2003/9/15

Y1 - 2003/9/15

N2 - A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

AB - A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

M3 - Patent

M1 - US20030663340

ER -