Switchable capacitor and method of making the same

Xavier Rottenberg (Inventor), Henri Jansen (Inventor), Hendrikus Tilmans (Inventor), Walter De Raedt (Inventor)

    Research output: Patent

    11 Downloads (Pure)

    Abstract

    A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
    Original languageEnglish
    Patent numberUS20030663340
    Publication statusSubmitted - 15 Sep 2003

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