Switchable capacitor and method of making the same

Xavier Rottenberg; Henri Jansen; Hendrikus Tilmans; Walter De Raedt

Switchable capacitor and method of making the same

Xavier Rottenberg (Inventor), Henri Jansen (Inventor), Hendrikus Tilmans (Inventor), Walter De Raedt (Inventor)

Research output: Patent

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Abstract

A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

Original language	English
Patent number	US7002439
Publication status	Accepted/In press - 21 Feb 2006

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title = "Switchable capacitor and method of making the same",

abstract = "A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.",

author = "Xavier Rottenberg and Henri Jansen and Hendrikus Tilmans and \{De Raedt\}, Walter",

year = "2006",

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T1 - Switchable capacitor and method of making the same

AU - Rottenberg, Xavier

AU - Jansen, Henri

AU - Tilmans, Hendrikus

AU - De Raedt, Walter

PY - 2006/2/21

Y1 - 2006/2/21

N2 - A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

AB - A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

M3 - Patent

M1 - US7002439

ER -

Switchable capacitor and method of making the same

Abstract

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