Synthesis of magnetic nanocomposite films SiC_xN_yFe_z by plasma-enhanced chemical decomposition of a gaseous mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium

A novel method is developed for the preparation of magnetic composite films with a complex composition SiC_xN_yFe_z using radio frequency plasma-enhanced chemical vapor decomposition of a gaseous mixture of 1,1,1,3,3,3-hexamethyldisilazane [(CH₃)₃Si]₂NH, ferrocene (C₅H₅)₂Fe, and helium. The films of various compositions are deposited in the temperature region 373-873 K. The dependence of physicochemical and functional properties of SiC_xN_yFe_z films on the synthesis conditions is studied with a number of modern methods such as IR spectroscopy, Raman spectroscopy, EDS, XPS, powder XRD. The IR spectra exhibit the same system of bonds as that in silicon carbonitride films, while the Raman spectra contain modes D and G indicating a presence of an impurity disordered graphite phase. It is established by the Faraday method and by electron paramagnetic resonance (EPR) that SiC_xN_yFe_z films prepared at 573-873 K are magnetic. According to the XPS data, the SiC_xN_yFe_z films may contain α-Fe, FeSi, or β-FeSi₂ phases with similar binding energies; as a result, the composition of these films is difficult to determine.