Synthesis of magnetic
nanocomposite films SiCxNyFez by plasma-enhanced
chemical decomposition of a gaseous mixture of 1,1,1,3,3,3-hexamethyldisilazane,
ferrocene, and helium
N. I. Fainer*, A. G. Plekhanov, R. V. Pushkarev, V. R. Shayapov, E. A. Maksimovskiy, V. A. Nadolinny, E. V. Korotaev, V. V. Kaichev
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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