Systemetic and random errors in rotating-analyzer ellipsometry

J.J.M. de Nijs, Arend van Silfhout

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Original languageUndefined
Title of host publicationSelected papers on ellipsometry, serie SPIE Mile Stone Series, Volume MS27
Place of PublicationWashington
PublisherM.R.A. Azzam
Number of pages9
Publication statusPublished - 1991


  • METIS-129781

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