Systemetic and random errors in rotating-analyzer ellipsometry

J.J.M. de Nijs, Arend van Silfhout

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined
Title of host publication	Selected papers on ellipsometry, serie SPIE Mile Stone Series, Volume MS27
Place of Publication	Washington
Publisher	M.R.A. Azzam
Pages	535-543
Number of pages	9
Publication status	Published - 1991

Keywords

@inbook{13e5603b66224c8081617fcb4ab36571,

title = "Systemetic and random errors in rotating-analyzer ellipsometry",

keywords = "METIS-129781",

author = "{de Nijs}, J.J.M. and {van Silfhout}, Arend",

year = "1991",

language = "Undefined",

pages = "535--543",

booktitle = "Selected papers on ellipsometry, serie SPIE Mile Stone Series, Volume MS27",

publisher = "M.R.A. Azzam",

}