Tailoring spectral properties of Extreme UV multilayer optics

Viacheslav Medvedev

Research output: ThesisPhD Thesis - Research external, graduation UT

189 Downloads (Pure)
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey , Co-Supervisor
Award date4 Nov 2015
Place of PublicationEnschede
Publisher
Print ISBNs97894623311563
Publication statusPublished - 4 Nov 2015

Keywords

  • IR-98979
  • METIS-312293

Cite this

Medvedev, V. (2015). Tailoring spectral properties of Extreme UV multilayer optics. Enschede: Universiteit Twente.