Tailoring spectral properties of Extreme UV multilayer optics

Viacheslav V. Medvedev

Research output: ThesisPhD Thesis - Research external, graduation UT

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey, Co-Supervisor
Award date4 Nov 2015
Place of PublicationEnschede
Publisher
DOIs
Publication statusPublished - 4 Nov 2015

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