Tailoring spectral properties of Extreme UV multilayer optics

Viacheslav V. Medvedev

Research output: Thesis › PhD Thesis - Research external, graduation UT

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Yakshin, Andrey, Co-Supervisor
Award date	4 Nov 2015
Place of Publication	Enschede
Publisher	University of Twente
DOIs	https://doi.org/10.3990/1.6051304
Publication status	Published - 4 Nov 2015

Access to Document

@phdthesis{9a4c903309f543f68557c71d4bc73029,

title = "Tailoring spectral properties of Extreme UV multilayer optics",

author = "Medvedev, {Viacheslav V.}",

year = "2015",

month = nov,

day = "4",

doi = "10.3990/1.6051304",

language = "English",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research external, graduation UT",

school = "University of Twente",

}