Tailoring spectral properties of Extreme UV multilayer optics

Viacheslav Medvedev

Research output: Thesis › PhD Thesis - Research external, graduation UT

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Original language	English
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Yakshin, Andrey , Co-Supervisor
Award date	4 Nov 2015
Place of Publication	Enschede
Publisher	Universiteit Twente
Print ISBNs	97894623311563
Publication status	Published - 4 Nov 2015

Cite this

@phdthesis{9a4c903309f543f68557c71d4bc73029,

title = "Tailoring spectral properties of Extreme UV multilayer optics",

keywords = "IR-98979, METIS-312293",

author = "Viacheslav Medvedev",

year = "2015",

month = "11",

day = "4",

language = "English",

isbn = "97894623311563",

publisher = "Universiteit Twente",

school = "University of Twente",

}