Taking piezoelectric microsystems from the laboratory to production

H. Raeder, F. Tyholdt, W. Booij, F. Calame, N.P. Ostbo, R. Bredesen, K. Prume, Augustinus J.H.M. Rijnders, P. Muralt

Research output: Contribution to journalArticleAcademic

18 Citations (Scopus)
6 Downloads (Pure)

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