Targeted positioning of quantum dots inside 3D silicon photonic crystals observed by synchrotron X-ray fluorescence tomography

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Abstract

We perform X-ray fluorescence tomography of a 3D photonic band gap crystal made from silicon with embedded quantum dot nanocrystals. We obtain the position of the quantum dots with a resolution of 50nm.
Original languageEnglish
Number of pages1
Publication statusPublished - 25 Jun 2021
EventCLEO/EUROPE-EQEC 2021 - Online conference
Duration: 21 Jun 202125 Jun 2021
https://www.cleoeurope.org/foreword/

Conference

ConferenceCLEO/EUROPE-EQEC 2021
Abbreviated titleCLEO EUROPE
Period21/06/2125/06/21
Internet address

Keywords

  • 3D integration
  • complementary metal-oxide-semiconductor (CMOS)
  • nanofabrication
  • photonic crystals
  • quantum dots
  • x-ray fluorescence imaging

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