Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

Ming-Jiang Zhou; Ton Ikkink; John Chalmers; Herma van Kranenburg; Hans Albers; Jisk Holleman; Paul Lambeck; Jan Leendert Joppe; Herman Bekman; Ton de Krijger

Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

Ming-Jiang Zhou, Ton Ikkink, John Chalmers, Herma van Kranenburg, Hans Albers, Jisk Holleman, Paul Lambeck, Jan Leendert Joppe, Herman Bekman, Ton de Krijger

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.

Original language	English
Title of host publication	Sensor Technology 1994
Subtitle of host publication	proceedings of the Dutch Conference on Sensor Technology 1994
Editors	P.V. Lambeck
Place of Publication	Enschede
Publisher	University of Twente
Pages	205-210
Number of pages	6
Publication status	Published - 17 Feb 1994
Event	Dutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands Duration: 17 Feb 1994 → 18 Feb 1994

Conference

Conference	Dutch Conference on Sensor Technology 1994
Country/Territory	Netherlands
City	Enschede
Period	17/02/94 → 18/02/94

Keywords

METIS-114406
IR-96420

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Zhou, M.-J., Ikkink, T., Chalmers, J., van Kranenburg, H., Albers, H., Holleman, J., Lambeck, P., Joppe, J. L., Bekman, H., & de Krijger, T. (1994). Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon. In P. V. Lambeck (Ed.), Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994 (pp. 205-210). University of Twente.

Zhou, Ming-Jiang ; Ikkink, Ton ; Chalmers, John et al. / Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon. Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994. editor / P.V. Lambeck. Enschede : University of Twente, 1994. pp. 205-210

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title = "Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon",

abstract = "In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.",

keywords = "METIS-114406, IR-96420",

author = "Ming-Jiang Zhou and Ton Ikkink and John Chalmers and {van Kranenburg}, Herma and Hans Albers and Jisk Holleman and Paul Lambeck and Joppe, {Jan Leendert} and Herman Bekman and {de Krijger}, Ton",

year = "1994",

month = feb,

day = "17",

language = "English",

pages = "205--210",

editor = "P.V. Lambeck",

booktitle = "Sensor Technology 1994",

publisher = "University of Twente",

address = "Netherlands",

note = "Dutch Conference on Sensor Technology 1994 ; Conference date: 17-02-1994 Through 18-02-1994",

}

Zhou, M-J, Ikkink, T, Chalmers, J, van Kranenburg, H, Albers, H, Holleman, J, Lambeck, P, Joppe, JL, Bekman, H & de Krijger, T 1994, Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon. in PV Lambeck (ed.), Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994. University of Twente, Enschede, pp. 205-210, Dutch Conference on Sensor Technology 1994, Enschede, Netherlands, 17/02/94.

Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon. / Zhou, Ming-Jiang; Ikkink, Ton; Chalmers, John et al.
Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994. ed. / P.V. Lambeck. Enschede: University of Twente, 1994. p. 205-210.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

AU - Zhou, Ming-Jiang

AU - Ikkink, Ton

AU - Chalmers, John

AU - van Kranenburg, Herma

AU - Albers, Hans

AU - Holleman, Jisk

AU - Lambeck, Paul

AU - Joppe, Jan Leendert

AU - Bekman, Herman

AU - de Krijger, Ton

PY - 1994/2/17

Y1 - 1994/2/17

N2 - In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.

AB - In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.

KW - METIS-114406

KW - IR-96420

M3 - Conference contribution

SP - 205

EP - 210

BT - Sensor Technology 1994

A2 - Lambeck, P.V.

PB - University of Twente

CY - Enschede

T2 - Dutch Conference on Sensor Technology 1994

Y2 - 17 February 1994 through 18 February 1994

ER -

Zhou MJ, Ikkink T, Chalmers J, van Kranenburg H, Albers H, Holleman J et al. Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon. In Lambeck PV, editor, Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994. Enschede: University of Twente. 1994. p. 205-210

Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

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