Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

Ming-Jiang Zhou, Ton Ikkink, John Chalmers, Herma van Kranenburg, Hans Albers, Jisk Holleman, Paul Lambeck, Jan Leendert Joppe, Herman Bekman, Ton de Krijger

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    Abstract

    In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.
    Original languageEnglish
    Title of host publicationSensor Technology 1994
    Subtitle of host publicationproceedings of the Dutch Conference on Sensor Technology 1994
    EditorsP.V. Lambeck
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Pages205-210
    Number of pages6
    Publication statusPublished - 17 Feb 1994
    EventDutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands
    Duration: 17 Feb 199418 Feb 1994

    Conference

    ConferenceDutch Conference on Sensor Technology 1994
    CountryNetherlands
    CityEnschede
    Period17/02/9418/02/94

    Keywords

    • METIS-114406
    • IR-96420

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