Technological aspects of gaseous pixel detectors fabrication

V.M. Blanco Carballo, Cora Salm, Sander M. Smits, Jurriaan Schmitz, J. Melai, M.A. Chefdeville, H. van der Graaf

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    Abstract

    Integrated gaseous pixel detectors consisting of a metal punctured foil suspended in the order of 50μm over a pixel readout chip by means by SU-8 insulating pillars have been fabricated. SU-8 is used as sacrificial layer but metallization over uncrosslinked SU-8 presents adhesion and stress problems. In this paper we describe the several methods we have investigated to fabricate a metal layer on top of a partially crosslinked SU-8 film and the challenges we have encountered. The fabrication process using wafer post processing has been proven, but in cases where single chip processing is desirable, edge bead is a major problem to overcome as it can cover a considerable chip area, reducing the detector performance; we show different techniques to reduce this edge bead and improve detection efficiency.
    Original languageUndefined
    Title of host publication10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages501-503
    Number of pages3
    ISBN (Print)978-90-73461-49-9
    Publication statusPublished - 29 Nov 2007
    Event10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands
    Duration: 29 Nov 200730 Nov 2007

    Publication series

    Name
    PublisherTechnology Foundation STW
    Number7

    Workshop

    Workshop10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
    CountryNetherlands
    CityVeldhoven
    Period29/11/0730/11/07

    Keywords

    • SC-RID: Radiation Imaging detectors
    • METIS-245937
    • IR-62114
    • EWI-11722

    Cite this

    Blanco Carballo, V. M., Salm, C., Smits, S. M., Schmitz, J., Melai, J., Chefdeville, M. A., & van der Graaf, H. (2007). Technological aspects of gaseous pixel detectors fabrication. In 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE) (pp. 501-503). Utrecht, The Netherlands: STW.