Technology Development for MEMS: A Tutorial

Paddy J. French*, Gijs J.M. Krijnen, Sten Vollebregt, Massimo Mastrangeli

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
328 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Technology Development for MEMS: A Tutorial'. Together they form a unique fingerprint.

Engineering

Chemistry

Material Science