Temperature dependence of the 1727 cm-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor

A. Susarrey Arce; Roald M. Tiggelaar; Remco G.P. Sanders; Bert Geerdink; Leonardus Lefferts; Johannes G.E. Gardeniers; Arie van Houselt

doi:10.1021/jp4065328

Temperature dependence of the 1727 cm^-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor

A. Susarrey Arce, Roald M. Tiggelaar, Remco G.P. Sanders, Bert Geerdink, Leonardus Lefferts, Johannes G.E. Gardeniers, Arie van Houselt

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this work we study oxygen interstitial defects (Oi) in a silicon-technology-based microreactor with an integrated attenuated total internal reflection (ATR) crystal as a function of an externally applied potential by means of attenuated total internal reflection infrared spectroscopy (ATR-IR). A reduction of the 1727 cm–1 Oi IR absorption band is observed with increasing potential. We evidence that this band is related to the presence of Oi, which enables detection of Oi by ATR-IR spectroscopy. The observed reduction with increasing potential is ascribed to an increase in temperature, due to resistive heating of the silicon.

Original language	English
Pages (from-to)	21936-21942
Journal	The Journal of physical chemistry C
Volume	117
Issue number	42
DOIs	https://doi.org/10.1021/jp4065328
Publication status	Published - 24 Oct 2013

Keywords

METIS-297908
IR-95272

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10.1021/jp4065328

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Susarrey Arce, A., Tiggelaar, R. M., Sanders, R. G. P., Geerdink, B., Lefferts, L., Gardeniers, J. G. E., & van Houselt, A. (2013). Temperature dependence of the 1727 cm^-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor. The Journal of physical chemistry C, 117(42), 21936-21942. https://doi.org/10.1021/jp4065328

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title = "Temperature dependence of the 1727 cm-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor",

abstract = "In this work we study oxygen interstitial defects (Oi) in a silicon-technology-based microreactor with an integrated attenuated total internal reflection (ATR) crystal as a function of an externally applied potential by means of attenuated total internal reflection infrared spectroscopy (ATR-IR). A reduction of the 1727 cm–1 Oi IR absorption band is observed with increasing potential. We evidence that this band is related to the presence of Oi, which enables detection of Oi by ATR-IR spectroscopy. The observed reduction with increasing potential is ascribed to an increase in temperature, due to resistive heating of the silicon.",

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author = "{Susarrey Arce}, A. and Tiggelaar, {Roald M.} and Sanders, {Remco G.P.} and Bert Geerdink and Leonardus Lefferts and Gardeniers, {Johannes G.E.} and {van Houselt}, Arie",

year = "2013",

month = oct,

day = "24",

doi = "10.1021/jp4065328",

language = "English",

volume = "117",

pages = "21936--21942",

journal = "The Journal of physical chemistry C",

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publisher = "American Chemical Society",

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Susarrey Arce, A , Tiggelaar, RM , Sanders, RGP , Geerdink, B , Lefferts, L , Gardeniers, JGE & van Houselt, A 2013, 'Temperature dependence of the 1727 cm^-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor', The Journal of physical chemistry C, vol. 117, no. 42, pp. 21936-21942. https://doi.org/10.1021/jp4065328

Temperature dependence of the 1727 cm^-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor. / Susarrey Arce, A.; Tiggelaar, Roald M.; Sanders, Remco G.P. et al.
In: The Journal of physical chemistry C, Vol. 117, No. 42, 24.10.2013, p. 21936-21942.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Temperature dependence of the 1727 cm-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor

AU - Susarrey Arce, A.

AU - Tiggelaar, Roald M.

AU - Sanders, Remco G.P.

AU - Geerdink, Bert

AU - Lefferts, Leonardus

AU - Gardeniers, Johannes G.E.

AU - van Houselt, Arie

PY - 2013/10/24

Y1 - 2013/10/24

N2 - In this work we study oxygen interstitial defects (Oi) in a silicon-technology-based microreactor with an integrated attenuated total internal reflection (ATR) crystal as a function of an externally applied potential by means of attenuated total internal reflection infrared spectroscopy (ATR-IR). A reduction of the 1727 cm–1 Oi IR absorption band is observed with increasing potential. We evidence that this band is related to the presence of Oi, which enables detection of Oi by ATR-IR spectroscopy. The observed reduction with increasing potential is ascribed to an increase in temperature, due to resistive heating of the silicon.

AB - In this work we study oxygen interstitial defects (Oi) in a silicon-technology-based microreactor with an integrated attenuated total internal reflection (ATR) crystal as a function of an externally applied potential by means of attenuated total internal reflection infrared spectroscopy (ATR-IR). A reduction of the 1727 cm–1 Oi IR absorption band is observed with increasing potential. We evidence that this band is related to the presence of Oi, which enables detection of Oi by ATR-IR spectroscopy. The observed reduction with increasing potential is ascribed to an increase in temperature, due to resistive heating of the silicon.

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KW - IR-95272

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U2 - 10.1021/jp4065328

DO - 10.1021/jp4065328

M3 - Article

SN - 1932-7447

VL - 117

SP - 21936

EP - 21942

JO - The Journal of physical chemistry C

JF - The Journal of physical chemistry C

IS - 42

ER -

Temperature dependence of the 1727 cm^-1 interstitial oxygen absorption band studied by attenuated total internal reflection infrared spectroscopy in a newly developed microreactor

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