Temperature Effect on Protection Diode for Plasma-Process Induced Charging Damage

Zhichun Wang, A. Scarpa, Sander M. Smits, F.G. Kuper, Cora Salm

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages127-130
    Number of pages4
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 27 Nov 2002

    Keywords

    • METIS-207343

    Cite this

    Wang, Z., Scarpa, A., Smits, S. M., Kuper, F. G., & Salm, C. (2002). Temperature Effect on Protection Diode for Plasma-Process Induced Charging Damage. In Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002 (pp. 127-130). Utrecht, The Netherlands: STW.