TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase

Enrico G. Keim; W.F. Lisowski; M.A. Smithers

TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase

Enrico G. Keim, W.F. Lisowski, M.A. Smithers

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 3 Aug 2008
Event	Microscopy & Microanalysis 2008 - Albuquerque, United States Duration: 3 Aug 2008 → 7 Aug 2008

Conference

Conference	Microscopy & Microanalysis 2008
Country/Territory	United States
City	Albuquerque
Period	3/08/08 → 7/08/08

Keywords

METIS-251975

Cite this

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title = "TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase",

keywords = "METIS-251975",

author = "Keim, {Enrico G.} and W.F. Lisowski and M.A. Smithers",

year = "2008",

month = aug,

day = "3",

language = "Undefined",

pages = "--",

note = "Microscopy & Microanalysis 2008 ; Conference date: 03-08-2008 Through 07-08-2008",

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TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase. / Keim, Enrico G.; Lisowski, W.F.; Smithers, M.A.
2008. - Poster session presented at Microscopy & Microanalysis 2008, Albuquerque, New Mexico, United States.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase

AU - Keim, Enrico G.

AU - Lisowski, W.F.

AU - Smithers, M.A.

PY - 2008/8/3

Y1 - 2008/8/3

KW - METIS-251975

M3 - Poster

SP - -

T2 - Microscopy & Microanalysis 2008

Y2 - 3 August 2008 through 7 August 2008

ER -