TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

Enrico G. Keim, W.F. Lisowski, M.A. Smithers

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)316CD-317CD
    Number of pages2
    JournalMicroscopy and microanalysis
    Volume14
    Issue number2
    Publication statusPublished - 2008

    Keywords

    • METIS-251973

    Cite this

    @article{d00417ffeaae4b0c948d3c137100f11c,
    title = "TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase",
    keywords = "METIS-251973",
    author = "Keim, {Enrico G.} and W.F. Lisowski and M.A. Smithers",
    year = "2008",
    language = "Undefined",
    volume = "14",
    pages = "316CD--317CD",
    journal = "Microscopy and microanalysis",
    issn = "1431-9276",
    publisher = "Cambridge University Press",
    number = "2",

    }

    TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase. / Keim, Enrico G.; Lisowski, W.F.; Smithers, M.A.

    In: Microscopy and microanalysis, Vol. 14, No. 2, 2008, p. 316CD-317CD.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

    AU - Keim, Enrico G.

    AU - Lisowski, W.F.

    AU - Smithers, M.A.

    PY - 2008

    Y1 - 2008

    KW - METIS-251973

    M3 - Article

    VL - 14

    SP - 316CD-317CD

    JO - Microscopy and microanalysis

    JF - Microscopy and microanalysis

    SN - 1431-9276

    IS - 2

    ER -