TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

E.G. Keim, W. Lisowski, M.A. Smithers

    Research output: Contribution to journalArticleAcademicpeer-review

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    Original languageEnglish
    Pages (from-to)316CD-317CD
    Number of pages2
    JournalMicroscopy and microanalysis
    Issue number2
    Publication statusPublished - 2008
    EventMicroscopy and Microanalysis 2008
    - Albuquerque, United States
    Duration: 3 Aug 20087 Aug 2008


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