TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

Enrico G. Keim, W.F. Lisowski, M.A. Smithers

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)316CD-317CD
    Number of pages2
    JournalMicroscopy and microanalysis
    Volume14
    Issue number2
    Publication statusPublished - 2008

    Keywords

    • METIS-251973

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