TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

E.G. Keim; W. Lisowski; M.A. Smithers

doi:10.1017/S1431927608081117

TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

E.G. Keim, W. Lisowski, M.A. Smithers

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	English
Pages (from-to)	316CD-317CD
Number of pages	2
Journal	Microscopy and microanalysis
Volume	14
Issue number	2
DOIs	https://doi.org/10.1017/S1431927608081117
Publication status	Published - 2008
Event	Microscopy and Microanalysis 2008 - Albuquerque, United States Duration: 3 Aug 2008 → 7 Aug 2008

Keywords

22/4 OA procedure

Access to Document

10.1017/S1431927608081117

ArticleFinal published version, 1.35 MBLicence: Taverne

Cite this

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title = "TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase",

keywords = "22/4 OA procedure",

author = "E.G. Keim and W. Lisowski and M.A. Smithers",

note = "Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008 ; Microscopy and Microanalysis 2008<br/> ; Conference date: 03-08-2008 Through 07-08-2008",

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T1 - TEM/SEM studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TidY phase

AU - Keim, E.G.

AU - Lisowski, W.

AU - Smithers, M.A.

N1 - Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

PY - 2008

Y1 - 2008

KW - 22/4 OA procedure

U2 - 10.1017/S1431927608081117

DO - 10.1017/S1431927608081117

M3 - Article

SN - 1431-9276

VL - 14

SP - 316CD-317CD

JO - Microscopy and microanalysis

JF - Microscopy and microanalysis

IS - 2

T2 - Microscopy and Microanalysis 2008<br/>

Y2 - 3 August 2008 through 7 August 2008

ER -