Test structure design considerations for RF-CV measurements on leaky dielectrics

J. Schmitz, F.N. Cubaynes, R.J. Havens, R. de Kort, A.J. Scholten, L.F. Tiemeijer

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    8 Citations (Scopus)
    12 Downloads (Pure)

    Abstract

    We present a MOS capacitance-voltage measurement methodology that, contrary to present methods, is highly robust against gate leakage current densities up to 1000 A/cm/sup 2/. The methodology features specially designed RF test structures and RF measurement frequencies. It allows MOS parameter extraction in the full range of accumulation, depletion and inversion.
    Original languageEnglish
    Title of host publicationICMTS 2003
    Subtitle of host publicationProceedings of the 2003 International Conference on Microelectronic Test Structures : March 17-20, 2003, Double Tree Hotel, Monterey, California
    Place of PublicationPiscataway, NJ
    PublisherIEEE Computer Society
    Pages181-185
    Number of pages5
    ISBN (Print)0-7803-7653-6
    DOIs
    Publication statusPublished - 7 May 2003
    Event16th International Conference on Microelectronic Test Structures, ICMTS 2003 - Monterey, United States
    Duration: 17 Mar 200320 Mar 2003
    Conference number: 16
    http://www.homepages.ed.ac.uk/ajw/ICMTS/prog03.html

    Conference

    Conference16th International Conference on Microelectronic Test Structures, ICMTS 2003
    Abbreviated titleICMTS
    CountryUnited States
    CityMonterey
    Period17/03/0320/03/03
    Internet address

    Keywords

    • Integrated circuit design
    • Capacitance
    • CMOS integrated circuits
    • Dielectric thin films

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  • Cite this

    Schmitz, J., Cubaynes, F. N., Havens, R. J., de Kort, R., Scholten, A. J., & Tiemeijer, L. F. (2003). Test structure design considerations for RF-CV measurements on leaky dielectrics. In ICMTS 2003: Proceedings of the 2003 International Conference on Microelectronic Test Structures : March 17-20, 2003, Double Tree Hotel, Monterey, California (pp. 181-185). Piscataway, NJ: IEEE Computer Society. https://doi.org/10.1109/ICMTS.2003.1197458