Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon

L.K. Nanver, X. Liu, Tihomir Knezevic

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    8 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    A set of ring-shaped test structures is presented for electrical characterization of 2D as-deposited layers on Si that electrically interact with the substrate. The test method is illustrated by investigation of 3 different nm-thin layers that are expected to form an interfacial layer of negative fixed charge. A test procedure is described that gives a low turnaround time and non-destructive way of evaluating different deposition methods in terms of diode characteristics, interface conductance, and electron carrier injection into the deposited layer.
    Original languageEnglish
    Title of host publicationICMTS 2018 - Proceedings of the 2018 IEEE International Conference on Microelectronic Test Structures
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages69-74
    Number of pages6
    ISBN (Electronic)978-1-5386-5071-4
    ISBN (Print)978-1-5386-5069-1
    DOIs
    Publication statusPublished - 12 Jun 2018
    Event31st IEEE International Conference on Microelectronic Test Structures 2018 - Courtyard Marriott Downtown, Austin, United States
    Duration: 19 Mar 201822 Mar 2018
    Conference number: 31

    Publication series

    NameIEEE International Conference on Microelectronic Test Structures
    Volume2018-March

    Conference

    Conference31st IEEE International Conference on Microelectronic Test Structures 2018
    Abbreviated titleICMTS 2018
    Country/TerritoryUnited States
    CityAustin
    Period19/03/1822/03/18

    Keywords

    • aluminum
    • atomic layer deposition
    • boron
    • chemical vapor deposition
    • electron injection
    • interface charge

    Fingerprint

    Dive into the research topics of 'Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon'. Together they form a unique fingerprint.

    Cite this