Testable Design and testing of Microsystems

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    Abstract

    The market of microsystems, incorporating microelectronics with e.g. MEMS-based sensors and actuators increases rapidly. The often non-electrical sensors and actuators are notoriously difficult and/or expensive to test. As the entire micro system has to meet certain quality criteria for specific applications, new techniques are being developed. This tutorial will show current test practices of several basic categories of microsystems, and also methods to reduce or circumvent test problems. In these approaches, good knowledge on defects in the systems is required, and design modifications or extensions are shown to ease the testing process.
    Original languageEnglish
    Number of pages70
    Publication statusPublished - Nov 2005
    Event2005 IEEE Sensors Conference - Hyatt Regency Irvine, Irvine, United States
    Duration: 31 Oct 20053 Nov 2005
    http://ewh.ieee.org/conf/sensors2005/

    Conference

    Conference2005 IEEE Sensors Conference
    CountryUnited States
    CityIrvine
    Period31/10/053/11/05
    Internet address

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  • Cite this

    Kerkhoff, H. G. (2005). Testable Design and testing of Microsystems. Paper presented at 2005 IEEE Sensors Conference, Irvine, United States.