Testable Design and testing of Microsystems

The market of microsystems, incorporating microelectronics with e.g. MEMS-based sensors and actuators increases rapidly. The often non-electrical sensors and actuators are notoriously difficult and/or expensive to test. As the entire micro system has to meet certain quality criteria for specific applications, new techniques are being developed. This tutorial will show current test practices of several basic categories of microsystems, and also methods to reduce or circumvent test problems. In these approaches, good knowledge on defects in the systems is required, and design modifications or extensions are shown to ease the testing process.