Testable Design and testing of Microsystems

Research output: Contribution to conferencePaperAcademic

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Abstract

The market of microsystems, incorporating microelectronics with e.g. MEMS-based sensors and actuators increases rapidly. The often non-electrical sensors and actuators are notoriously difficult and/or expensive to test. As the entire micro system has to meet certain quality criteria for specific applications, new techniques are being developed. This tutorial will show current test practices of several basic categories of microsystems, and also methods to reduce or circumvent test problems. In these approaches, good knowledge on defects in the systems is required, and design modifications or extensions are shown to ease the testing process.
Original languageEnglish
Number of pages70
Publication statusPublished - Nov 2005
Event2005 IEEE Sensors Conference - Hyatt Regency Irvine, Irvine, United States
Duration: 31 Oct 20053 Nov 2005
http://ewh.ieee.org/conf/sensors2005/

Conference

Conference2005 IEEE Sensors Conference
CountryUnited States
CityIrvine
Period31/10/053/11/05
Internet address

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Microsystems
Actuators
Sensors
Testing
Microelectronics
MEMS
Defects

Cite this

Kerkhoff, H. G. (2005). Testable Design and testing of Microsystems. Paper presented at 2005 IEEE Sensors Conference, Irvine, United States.
Kerkhoff, Hans G. / Testable Design and testing of Microsystems. Paper presented at 2005 IEEE Sensors Conference, Irvine, United States.70 p.
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Kerkhoff, HG 2005, 'Testable Design and testing of Microsystems' Paper presented at 2005 IEEE Sensors Conference, Irvine, United States, 31/10/05 - 3/11/05, .

Testable Design and testing of Microsystems. / Kerkhoff, Hans G.

2005. Paper presented at 2005 IEEE Sensors Conference, Irvine, United States.

Research output: Contribution to conferencePaperAcademic

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Kerkhoff HG. Testable Design and testing of Microsystems. 2005. Paper presented at 2005 IEEE Sensors Conference, Irvine, United States.