Testing of MEMS-based microsystems

Hans G. Kerkhoff

doi:10.1109/ETS.2005.40

Testing of MEMS-based microsystems

Hans G. Kerkhoff

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

12 Citations (Scopus)

1 Downloads (Pure)

Abstract

The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.

Original language	Undefined
Title of host publication	Proceedings of the 10th IEEE European Test Symposium, ETS 2005
Place of Publication	USA
Publisher	IEEE
Pages	223-228
Number of pages	6
ISBN (Print)	0-7695-2341-2
DOIs	https://doi.org/10.1109/ETS.2005.40
Publication status	Published - 2005
Event	10th IEEE European Test Symposium, ETS 2005 - Tallinn, Estonia Duration: 22 May 2005 → 25 May 2005 Conference number: 10

Publication series

Name
Publisher	IEEE

Conference

Conference	10th IEEE European Test Symposium, ETS 2005
Abbreviated title	ETS
Country/Territory	Estonia
City	Tallinn
Period	22/05/05 → 25/05/05

Keywords

IR-76473
EWI-19866
METIS-226920

Access to Document

10.1109/ETS.2005.40

http://eprints.eemcs.utwente.nl/secure2/19866/01/01430035.pdf

Cite this

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title = "Testing of MEMS-based microsystems",

abstract = "The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.",

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AB - The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.

KW - IR-76473

KW - EWI-19866

KW - METIS-226920

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DO - 10.1109/ETS.2005.40

M3 - Conference contribution

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