Testing of MEMS-based microsystems

Hans G. Kerkhoff

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    11 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.
    Original languageUndefined
    Title of host publicationProceedings of the 10th IEEE European Test Symposium, ETS 2005
    Place of PublicationUSA
    PublisherIEEE
    Pages223-228
    Number of pages6
    ISBN (Print)0-7695-2341-2
    DOIs
    Publication statusPublished - 2005
    Event10th IEEE European Test Symposium, ETS 2005 - Tallinn, Estonia
    Duration: 22 May 200525 May 2005
    Conference number: 10

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference10th IEEE European Test Symposium, ETS 2005
    Abbreviated titleETS
    CountryEstonia
    CityTallinn
    Period22/05/0525/05/05

    Keywords

    • IR-76473
    • EWI-19866
    • METIS-226920

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