Testing Philosophy behind the Micro Analysis System

Hans G. Kerkhoff

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    20 Citations (Scopus)
    Original languageUndefined
    Title of host publicationDesign, Test and Microfabrication of MEMS and MOEMS
    Place of PublicationParis, France
    Pages78-83
    Number of pages6
    Publication statusPublished - 30 Mar 1999

    Keywords

    • METIS-112999

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