Original language | Undefined |
---|---|
Title of host publication | Design, Test and Microfabrication of MEMS and MOEMS |
Place of Publication | Paris, France |
Pages | 78-83 |
Number of pages | 6 |
Publication status | Published - 30 Mar 1999 |
Keywords
- METIS-112999
Hans G. Kerkhoff
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | Design, Test and Microfabrication of MEMS and MOEMS |
Place of Publication | Paris, France |
Pages | 78-83 |
Number of pages | 6 |
Publication status | Published - 30 Mar 1999 |