Texture analysis of RTCVD Poly-Si layers

I. Barsony, J.G.E. Klappe, Hans Wallinga

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 19 Nov 1991
EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
Duration: 19 Nov 199120 Nov 1991

Conference

ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
CountryNetherlands
CityVeldhoven
Period19/11/9120/11/91

Keywords

  • METIS-117171

Cite this

Barsony, I., Klappe, J. G. E., & Wallinga, H. (1991). Texture analysis of RTCVD Poly-Si layers. -. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.
Barsony, I. ; Klappe, J.G.E. ; Wallinga, Hans. / Texture analysis of RTCVD Poly-Si layers. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.
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title = "Texture analysis of RTCVD Poly-Si layers",
keywords = "METIS-117171",
author = "I. Barsony and J.G.E. Klappe and Hans Wallinga",
year = "1991",
month = "11",
day = "19",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 19-11-1991 Through 20-11-1991",

}

Barsony, I, Klappe, JGE & Wallinga, H 1991, 'Texture analysis of RTCVD Poly-Si layers' IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands, 19/11/91 - 20/11/91, pp. -.

Texture analysis of RTCVD Poly-Si layers. / Barsony, I.; Klappe, J.G.E.; Wallinga, Hans.

1991. - Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Texture analysis of RTCVD Poly-Si layers

AU - Barsony, I.

AU - Klappe, J.G.E.

AU - Wallinga, Hans

PY - 1991/11/19

Y1 - 1991/11/19

KW - METIS-117171

M3 - Poster

SP - -

ER -

Barsony I, Klappe JGE, Wallinga H. Texture analysis of RTCVD Poly-Si layers. 1991. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.