Texture analysis of RTCVD Poly-Si layers

I. Barsony, J.G.E. Klappe, Hans Wallinga

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
    Duration: 19 Nov 199120 Nov 1991

    Conference

    ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
    CountryNetherlands
    CityVeldhoven
    Period19/11/9120/11/91

    Keywords

    • METIS-117171

    Cite this