Texture variations in sol-gel derived PZT films on substrates with platinum metallization

Johannes G.E. Gardeniers, Michael Curt Elwenspoek, C. Cobianu

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Abstract

Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.
Original languageEnglish
Pages451-456
Number of pages6
Publication statusPublished - 4 Apr 1994
EventMRS Spring Meeting 1994 - San Francisco, United States
Duration: 4 Apr 19948 Apr 1994

Conference

ConferenceMRS Spring Meeting 1994
CountryUnited States
CitySan Francisco
Period4/04/948/04/94

Keywords

  • EWI-14051
  • IR-65095

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    Gardeniers, J. G. E., Elwenspoek, M. C., & Cobianu, C. (1994). Texture variations in sol-gel derived PZT films on substrates with platinum metallization. 451-456. Paper presented at MRS Spring Meeting 1994, San Francisco, United States.