Texture variations in sol-gel derived PZT films on substrates with platinum metallization

Johannes G.E. Gardeniers; Michael Curt Elwenspoek; C. Cobianu

Texture variations in sol-gel derived PZT films on substrates with platinum metallization

Johannes G.E. Gardeniers, Michael Curt Elwenspoek, C. Cobianu

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Abstract

Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.

Original language	English
Pages	451-456
Number of pages	6
Publication status	Published - 4 Apr 1994
Event	MRS Spring Meeting 1994 - San Francisco, United States Duration: 4 Apr 1994 → 8 Apr 1994

Conference

Conference	MRS Spring Meeting 1994
Country/Territory	United States
City	San Francisco
Period	4/04/94 → 8/04/94

Keywords

EWI-14051
IR-65095

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@conference{e4257694bf974854838f59f201ffbc10,

title = "Texture variations in sol-gel derived PZT films on substrates with platinum metallization",

abstract = "Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.",

keywords = "EWI-14051, IR-65095",

author = "Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and C. Cobianu",

year = "1994",

month = apr,

day = "4",

language = "English",

pages = "451--456",

note = "MRS Spring Meeting 1994 ; Conference date: 04-04-1994 Through 08-04-1994",

}

TY - CONF

T1 - Texture variations in sol-gel derived PZT films on substrates with platinum metallization

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Cobianu, C.

PY - 1994/4/4

Y1 - 1994/4/4

N2 - Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.

AB - Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.

KW - EWI-14051

KW - IR-65095

M3 - Paper

SP - 451

EP - 456

T2 - MRS Spring Meeting 1994

Y2 - 4 April 1994 through 8 April 1994

ER -

Texture variations in sol-gel derived PZT films on substrates with platinum metallization

Abstract

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Keywords

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