Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Johannes G.E. Gardeniers; Michael Curt Elwenspoek; C. Cobianu

Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Johannes G.E. Gardeniers, Michael Curt Elwenspoek, C. Cobianu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	Undefined
Title of host publication	Materials Research Society Symposium, vol. 343
Editors	Katayun Barmak
Place of Publication	San Fransisco
Publisher	Materials Research Society
Pages	451-456
Number of pages	6
ISBN (Print)	9781558992436
Publication status	Published - 10 Nov 1994
Event	Symposium on Polycrystalline Thin Films - San Francisco, California, U.S.A. Duration: 4 Apr 1994 → 8 Apr 1994

Publication series

Name
Publisher	Materials Research Society

Conference

Conference	Symposium on Polycrystalline Thin Films
Period	4/04/94 → 8/04/94
Other	April 4-8, 1994

Keywords

METIS-114103
IR-17208

Access to Document

1227289

Cite this

@inproceedings{dfa540a689064f448b87af8758f3513e,

title = "Texture variations in sol-gel derived pzt films on substrates with platinum metallization",

keywords = "METIS-114103, IR-17208",

author = "Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and C. Cobianu",

year = "1994",

month = nov,

day = "10",

language = "Undefined",

isbn = "9781558992436",

publisher = "Materials Research Society",

pages = "451--456",

editor = "Katayun Barmak",

booktitle = "Materials Research Society Symposium, vol. 343",

address = "United States",

note = "Symposium on Polycrystalline Thin Films ; Conference date: 04-04-1994 Through 08-04-1994",

}

Texture variations in sol-gel derived pzt films on substrates with platinum metallization. / Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; Cobianu, C.
Materials Research Society Symposium, vol. 343. ed. / Katayun Barmak. San Fransisco: Materials Research Society, 1994. p. 451-456.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Texture variations in sol-gel derived pzt films on substrates with platinum metallization

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Cobianu, C.

PY - 1994/11/10

Y1 - 1994/11/10

KW - METIS-114103

KW - IR-17208

M3 - Conference contribution

SN - 9781558992436

SP - 451

EP - 456

BT - Materials Research Society Symposium, vol. 343

A2 - Barmak, Katayun

PB - Materials Research Society

CY - San Fransisco

T2 - Symposium on Polycrystalline Thin Films

Y2 - 4 April 1994 through 8 April 1994

ER -