Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Johannes G.E. Gardeniers, Michael Curt Elwenspoek, C. Cobianu

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
60 Downloads (Pure)
Original languageUndefined
Title of host publicationMaterials Research Society Symposium, vol. 343
EditorsKatayun Barmak
Place of PublicationSan Fransisco
PublisherMaterials Research Society
Pages451-456
Number of pages6
ISBN (Print)9781558992436
Publication statusPublished - 10 Nov 1994
EventSymposium on Polycrystalline Thin Films - San Francisco, California, U.S.A.
Duration: 4 Apr 19948 Apr 1994

Publication series

Name
PublisherMaterials Research Society

Conference

ConferenceSymposium on Polycrystalline Thin Films
Period4/04/948/04/94
OtherApril 4-8, 1994

Keywords

  • METIS-114103
  • IR-17208

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