The μ-flown: A novel device for measuring acoustic flows

H.E. de Bree; P.J. Leussink; M.T. Korthorst; Henricus V. Jansen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1016/S0924-4247(97)80013-1

The μ-flown: A novel device for measuring acoustic flows

H.E. de Bree, P.J. Leussink, M.T. Korthorst, Henricus V. Jansen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

173 Citations (Scopus)

204 Downloads (Pure)

Abstract

An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow. Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micromachined device measuring acoustic flows is called the microflown or μ-flown.

Original language	Undefined
Pages (from-to)	552-557
Number of pages	6
Journal	Sensors and actuators. A: Physical
Volume	54
Issue number	54
DOIs	https://doi.org/10.1016/S0924-4247(97)80013-1
Publication status	Published - Jun 1996

Keywords

METIS-111488
IR-14203
EWI-13565

Access to Document

10.1016/S0924-4247(97)80013-1

Cite this

@article{bd5e9f1811f846f7b60d7794b518c4b1,

title = "The μ-flown: A novel device for measuring acoustic flows",

abstract = "An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow. Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micromachined device measuring acoustic flows is called the microflown or μ-flown.",

keywords = "METIS-111488, IR-14203, EWI-13565",

author = "{de Bree}, H.E. and P.J. Leussink and M.T. Korthorst and Jansen, {Henricus V.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1996",

month = jun,

doi = "10.1016/S0924-4247(97)80013-1",

language = "Undefined",

volume = "54",

pages = "552--557",

journal = "Sensors and actuators. A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "54",

}

TY - JOUR

T1 - The μ-flown: A novel device for measuring acoustic flows

AU - de Bree, H.E.

AU - Leussink, P.J.

AU - Korthorst, M.T.

AU - Jansen, Henricus V.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 1996/6

Y1 - 1996/6

N2 - An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow. Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micromachined device measuring acoustic flows is called the microflown or μ-flown.

AB - An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow. Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micromachined device measuring acoustic flows is called the microflown or μ-flown.

KW - METIS-111488

KW - IR-14203

KW - EWI-13565

U2 - 10.1016/S0924-4247(97)80013-1

DO - 10.1016/S0924-4247(97)80013-1

M3 - Article

SN - 0924-4247

VL - 54

SP - 552

EP - 557

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

IS - 54

ER -