The μ-flown: Novel device measuring acoustical flows

H.E. de Bree, P.J. Leussink, M.T. Korthorst, Henricus V. Jansen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Abstract

    An acoustical wave consists of two elements, the acoustic pressure and the acoustic flow. Till now to determine the acoustic flow one has had, to measure the pressure and calculate the flow. So it would be convenient to have a sensor which is able to measure acoustical flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor and some of its interesting applications will be presented. This micromachined device is called the microflown.
    Original languageUndefined
    Title of host publicationProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
    Place of PublicationPiscataway
    PublisherIEEE
    Pages536-539
    Number of pages4
    ISBN (Print)91-630-3473-5
    DOIs
    Publication statusPublished - 25 Jun 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Publication series

    Name
    PublisherIEEE
    Volume1

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

    Keywords

    • IR-17218
    • METIS-114113
    • EWI-13855

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