The μ-flown: Novel device measuring acoustical flows

H.E. de Bree; P.J. Leussink; M.T. Korthorst; Henricus V. Jansen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1109/SENSOR.1995.717278

The μ-flown: Novel device measuring acoustical flows

H.E. de Bree, P.J. Leussink, M.T. Korthorst, Henricus V. Jansen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

An acoustical wave consists of two elements, the acoustic pressure and the acoustic flow. Till now to determine the acoustic flow one has had, to measure the pressure and calculate the flow. So it would be convenient to have a sensor which is able to measure acoustical flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor and some of its interesting applications will be presented. This micromachined device is called the microflown.

Original language	Undefined
Title of host publication	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
Place of Publication	Piscataway
Publisher	IEEE
Pages	536-539
Number of pages	4
ISBN (Print)	91-630-3473-5
DOIs	https://doi.org/10.1109/SENSOR.1995.717278
Publication status	Published - 25 Jun 1995
Event	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9

Publication series

Name
Publisher	IEEE
Volume	1

Conference

Conference	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

Keywords

IR-17218
METIS-114113
EWI-13855

Access to Document

10.1109/SENSOR.1995.717278

Cite this

@inproceedings{43ca31131f7547e8a3fb3bc9fcd43591,

title = "The μ-flown: Novel device measuring acoustical flows",

abstract = "An acoustical wave consists of two elements, the acoustic pressure and the acoustic flow. Till now to determine the acoustic flow one has had, to measure the pressure and calculate the flow. So it would be convenient to have a sensor which is able to measure acoustical flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor and some of its interesting applications will be presented. This micromachined device is called the microflown.",

keywords = "IR-17218, METIS-114113, EWI-13855",

author = "{de Bree}, H.E. and P.J. Leussink and M.T. Korthorst and Jansen, {Henricus V.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1995",

month = jun,

day = "25",

doi = "10.1109/SENSOR.1995.717278",

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isbn = "91-630-3473-5",

publisher = "IEEE",

pages = "536--539",

booktitle = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)",

address = "United States",

note = "Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors ; Conference date: 25-06-1995 Through 29-06-1995",

}

de Bree, HE, Leussink, PJ, Korthorst, MT, Jansen, HV, Lammerink, TSJ & Elwenspoek, MC 1995, The μ-flown: Novel device measuring acoustical flows. in Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2). IEEE, Piscataway, pp. 536-539, Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden, 25/06/95. https://doi.org/10.1109/SENSOR.1995.717278

The μ-flown: Novel device measuring acoustical flows. / de Bree, H.E.; Leussink, P.J.; Korthorst, M.T. et al.
Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2). Piscataway: IEEE, 1995. p. 536-539.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Leussink, P.J.

AU - Korthorst, M.T.

AU - Jansen, Henricus V.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

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KW - METIS-114113

KW - EWI-13855

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DO - 10.1109/SENSOR.1995.717278

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