Abstract
The 21st European workshop on micromachining, micromechanics and microsystems returned to the location where it started in 1989, in the town of Enschede, The Netherlands, on 26–29 September 2010. Since Miko Elwenspoek
started the workshop in 1989, it has been held in Berlin, Germany (1990), Leuven, Belgium (1992), Neuchatel, Switzerland (1993), Pisa, Italy (1994), Copenhagen, Denmark (1995), Barcelona, Spain (1996), Southampton, UK (1997) [1], Ulvik, Norway (1998) [2], Gif-sur-Yvette, France (1999) [3], Uppsala, Sweden (2000) [4], Cork, Ireland (2001), Sinaia, Romania (2002) [5], Delft, The Netherlands (2003) [6], Leuven, Belgium (2004) [7], Goteborg, Sweden (2005) [8], Southampton, UK (2006) [9], Guimaraes, Portugal (2007) [10], Aachen, Germany (2008) [11] and Toulouse, France (2009) [12].
Original language | Undefined |
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Pages (from-to) | 070201-070202 |
Number of pages | 2 |
Journal | Journal of micromechanics and microengineering |
Volume | 21 |
Issue number | 7 |
DOIs | |
Publication status | Published - Jul 2011 |
Keywords
- EWI-20290
- TST-uSPAM: micro Scanning Probe Array Memory
- IR-77631
- TST-Self Assembly
- METIS-277697
- TST-SMI: Formerly in EWI-SMI