The 21st MicroMechanics Europe Workshop (MME 2010)

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    Abstract

    The 21st European workshop on micromachining, micromechanics and microsystems returned to the location where it started in 1989, in the town of Enschede, The Netherlands, on 26–29 September 2010. Since Miko Elwenspoek started the workshop in 1989, it has been held in Berlin, Germany (1990), Leuven, Belgium (1992), Neuchatel, Switzerland (1993), Pisa, Italy (1994), Copenhagen, Denmark (1995), Barcelona, Spain (1996), Southampton, UK (1997) [1], Ulvik, Norway (1998) [2], Gif-sur-Yvette, France (1999) [3], Uppsala, Sweden (2000) [4], Cork, Ireland (2001), Sinaia, Romania (2002) [5], Delft, The Netherlands (2003) [6], Leuven, Belgium (2004) [7], Goteborg, Sweden (2005) [8], Southampton, UK (2006) [9], Guimaraes, Portugal (2007) [10], Aachen, Germany (2008) [11] and Toulouse, France (2009) [12].
    Original languageUndefined
    Pages (from-to)070201-070202
    Number of pages2
    JournalJournal of micromechanics and microengineering
    Volume21
    Issue number7
    DOIs
    Publication statusPublished - Jul 2011

    Keywords

    • EWI-20290
    • TST-uSPAM: micro Scanning Probe Array Memory
    • IR-77631
    • TST-Self Assembly
    • METIS-277697
    • TST-SMI: Formerly in EWI-SMI

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