The 21st MicroMechanics Europe Workshop (MME 2010)

The 21st European workshop on micromachining, micromechanics and microsystems returned to the location where it started in 1989, in the town of Enschede, The Netherlands, on 26–29 September 2010. Since Miko Elwenspoek started the workshop in 1989, it has been held in Berlin, Germany (1990), Leuven, Belgium (1992), Neuchatel, Switzerland (1993), Pisa, Italy (1994), Copenhagen, Denmark (1995), Barcelona, Spain (1996), Southampton, UK (1997) [1], Ulvik, Norway (1998) [2], Gif-sur-Yvette, France (1999) [3], Uppsala, Sweden (2000) [4], Cork, Ireland (2001), Sinaia, Romania (2002) [5], Delft, The Netherlands (2003) [6], Leuven, Belgium (2004) [7], Goteborg, Sweden (2005) [8], Southampton, UK (2006) [9], Guimaraes, Portugal (2007) [10], Aachen, Germany (2008) [11] and Toulouse, France (2009) [12].