The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

M.R. Wolffenbuttel, Paulus P.L. Regtien

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
21 Downloads (Pure)

Abstract

A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF
Original languageUndefined
Pages (from-to)188-191
Number of pages4
JournalIEEE transactions on instrumentation and measurement
Volume44
Issue number2
DOIs
Publication statusPublished - 1995

Keywords

  • METIS-111732
  • IR-14676

Cite this

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title = "The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances",
abstract = "A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF",
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The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances. / Wolffenbuttel, M.R.; Regtien, Paulus P.L.

In: IEEE transactions on instrumentation and measurement, Vol. 44, No. 2, 1995, p. 188-191.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

AU - Wolffenbuttel, M.R.

AU - Regtien, Paulus P.L.

PY - 1995

Y1 - 1995

N2 - A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF

AB - A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF

KW - METIS-111732

KW - IR-14676

U2 - 10.1109/19.377806

DO - 10.1109/19.377806

M3 - Article

VL - 44

SP - 188

EP - 191

JO - IEEE transactions on instrumentation and measurement

JF - IEEE transactions on instrumentation and measurement

SN - 0018-9456

IS - 2

ER -