The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

M.R. Wolffenbuttel, Paulus P.L. Regtien

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    Abstract

    A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF
    Original languageUndefined
    Pages (from-to)188-191
    Number of pages4
    JournalIEEE transactions on instrumentation and measurement
    Volume44
    Issue number2
    DOIs
    Publication statusPublished - 1995

    Keywords

    • METIS-111732
    • IR-14676

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