The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

M.R. Wolffenbuttel; Paulus P.L. Regtien

doi:10.1109/19.377806

The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

M.R. Wolffenbuttel, Paulus P.L. Regtien

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Abstract

A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF

Original language	Undefined
Pages (from-to)	188-191
Number of pages	4
Journal	IEEE transactions on instrumentation and measurement
Volume	44
Issue number	2
DOIs	https://doi.org/10.1109/19.377806
Publication status	Published - 1995

Keywords

METIS-111732
IR-14676

Access to Document

10.1109/19.377806

regtien95accurate

Cite this

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abstract = "A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF",

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AU - Wolffenbuttel, M.R.

AU - Regtien, Paulus P.L.

PY - 1995

Y1 - 1995

N2 - A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF

AB - A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF

KW - METIS-111732

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U2 - 10.1109/19.377806

DO - 10.1109/19.377806

M3 - Article

VL - 44

SP - 188

EP - 191

JO - IEEE transactions on instrumentation and measurement

JF - IEEE transactions on instrumentation and measurement

SN - 0018-9456

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