The annealing of 1 MeV implantations of boron in silicon

S. Oosterhoff, J. Middelhoek

    Research output: Contribution to journalArticleAcademic

    9 Citations (Scopus)
    140 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'The annealing of 1 MeV implantations of boron in silicon'. Together they form a unique fingerprint.

    Chemical Compounds

    Physics & Astronomy

    Engineering & Materials Science