The black silicon method V: a study for the fabrication of movable structures for micro electromechanical systems

Meint J. de Boer, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{26ab994f3ccf4784be6586431289667a,

title = "The black silicon method V: a study for the fabrication of movable structures for micro electromechanical systems",

keywords = "METIS-114934",

author = "\{de Boer\}, \{Meint J.\} and Jansen, \{Henricus V.\} and Elwenspoek, \{Michael Curt\}",

year = "1995",

month = jun,

day = "25",

language = "Undefined",

type = "Other",

}