The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems

Meint J. de Boer, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{05b8ca50401e4cf88c3edad7a48665b1,

title = "The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems",

keywords = "METIS-114954",

author = "{de Boer}, {Meint J.} and Jansen, {Henricus V.} and Elwenspoek, {Michael Curt}",

year = "1995",

month = jun,

day = "14",

language = "Undefined",

type = "Other",

}