The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems

Meint J. de Boer, Henricus V. Jansen, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, Dish Hotel
    Publication statusPublished - 14 Jun 1995


    • METIS-114954

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