The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems

Meint J. de Boer, Henricus V. Jansen, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, Dish Hotel
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114954

    Cite this

    @misc{05b8ca50401e4cf88c3edad7a48665b1,
    title = "The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems",
    keywords = "METIS-114954",
    author = "{de Boer}, {Meint J.} and Jansen, {Henricus V.} and Elwenspoek, {Michael Curt}",
    year = "1995",
    month = "6",
    day = "14",
    language = "Undefined",
    type = "Other",

    }

    The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems. / de Boer, Meint J.; Jansen, Henricus V.; Elwenspoek, Michael Curt.

    Enschede, Dish Hotel. 1995, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems

    AU - de Boer, Meint J.

    AU - Jansen, Henricus V.

    AU - Elwenspoek, Michael Curt

    PY - 1995/6/14

    Y1 - 1995/6/14

    KW - METIS-114954

    M3 - Other contribution

    CY - Enschede, Dish Hotel

    ER -