The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems

Meint J. de Boer, Henricus V. Jansen, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, Dish Hotel
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114954

    Cite this

    de Boer, M. J., Jansen, H. V., & Elwenspoek, M. C. (1995, Jun 14). The black silicon method V: a study of the fabricating of movable structures for micro electro mechanical systems. Enschede, Dish Hotel.