The CantiClever. A dedicated probe for magnetic force microscopy

A.G. van den Bos; I.R. Heskamp; Martin Herman Siekman; Leon Abelmann; J.C. Lodder

doi:10.1109/INTMAG.2002.1000809

The CantiClever. A dedicated probe for magnetic force microscopy

A.G. van den Bos, I.R. Heskamp, Martin Herman Siekman, Leon Abelmann, J.C. Lodder

Research output: Contribution to conference › Paper

93 Downloads (Pure)

Abstract

With the current rate of increase in areal density of magnetic recording systems, todays resolution of MFM needs to be improved in order to remain useful as a measurement tool. The resolution of MFM is amongst others determined by the geometry of the magnetic tip, which for commercial probes consists of a thin magnetic coating deposited on a pyramidal Si AFM tip. Analysis of the imaging process shows that the shape of these tips is not ideal. For higher resolution, the tip must be shaped as an elongated bar with a flat front end. In this contribution we present a completely new MFM cantilever, the CantiClever, which is not derived from traditional AFM probes but optimized for MFM. Our design incorporates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, allowing for batch fabrication of the probes. We realise the ideal tip shape by deposition of the magnetic material (Co) on the side of a free hanging silicon nitride layer.

Original language	Undefined
DOIs	https://doi.org/10.1109/INTMAG.2002.1000809
Publication status	Published - 2002
Event	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - RAI Congress Center, Amsterdam, Netherlands Duration: 28 Apr 2002 → 2 May 2002

Conference

Conference	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Abbreviated title	INTERMAG Europe 2002
Country/Territory	Netherlands
City	Amsterdam
Period	28/04/02 → 2/05/02

Keywords

IR-55896

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/INTMAG.2002.1000809

01000809

Cite this

@conference{5d5fd7cc256c48f5a8bfe1e0bb3b054a,

title = "The CantiClever. A dedicated probe for magnetic force microscopy",

abstract = "With the current rate of increase in areal density of magnetic recording systems, todays resolution of MFM needs to be improved in order to remain useful as a measurement tool. The resolution of MFM is amongst others determined by the geometry of the magnetic tip, which for commercial probes consists of a thin magnetic coating deposited on a pyramidal Si AFM tip. Analysis of the imaging process shows that the shape of these tips is not ideal. For higher resolution, the tip must be shaped as an elongated bar with a flat front end. In this contribution we present a completely new MFM cantilever, the CantiClever, which is not derived from traditional AFM probes but optimized for MFM. Our design incorporates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, allowing for batch fabrication of the probes. We realise the ideal tip shape by deposition of the magnetic material (Co) on the side of a free hanging silicon nitride layer.",

keywords = "IR-55896",

author = "{van den Bos}, A.G. and I.R. Heskamp and Siekman, {Martin Herman} and Leon Abelmann and J.C. Lodder",

year = "2002",

doi = "10.1109/INTMAG.2002.1000809",

language = "Undefined",

note = "2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 ; Conference date: 28-04-2002 Through 02-05-2002",

}

TY - CONF

T1 - The CantiClever. A dedicated probe for magnetic force microscopy

AU - van den Bos, A.G.

AU - Heskamp, I.R.

AU - Siekman, Martin Herman

AU - Abelmann, Leon

AU - Lodder, J.C.

PY - 2002

Y1 - 2002

N2 - With the current rate of increase in areal density of magnetic recording systems, todays resolution of MFM needs to be improved in order to remain useful as a measurement tool. The resolution of MFM is amongst others determined by the geometry of the magnetic tip, which for commercial probes consists of a thin magnetic coating deposited on a pyramidal Si AFM tip. Analysis of the imaging process shows that the shape of these tips is not ideal. For higher resolution, the tip must be shaped as an elongated bar with a flat front end. In this contribution we present a completely new MFM cantilever, the CantiClever, which is not derived from traditional AFM probes but optimized for MFM. Our design incorporates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, allowing for batch fabrication of the probes. We realise the ideal tip shape by deposition of the magnetic material (Co) on the side of a free hanging silicon nitride layer.

AB - With the current rate of increase in areal density of magnetic recording systems, todays resolution of MFM needs to be improved in order to remain useful as a measurement tool. The resolution of MFM is amongst others determined by the geometry of the magnetic tip, which for commercial probes consists of a thin magnetic coating deposited on a pyramidal Si AFM tip. Analysis of the imaging process shows that the shape of these tips is not ideal. For higher resolution, the tip must be shaped as an elongated bar with a flat front end. In this contribution we present a completely new MFM cantilever, the CantiClever, which is not derived from traditional AFM probes but optimized for MFM. Our design incorporates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, allowing for batch fabrication of the probes. We realise the ideal tip shape by deposition of the magnetic material (Co) on the side of a free hanging silicon nitride layer.

KW - IR-55896

U2 - 10.1109/INTMAG.2002.1000809

DO - 10.1109/INTMAG.2002.1000809

M3 - Paper

T2 - 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002

Y2 - 28 April 2002 through 2 May 2002

ER -