Abstract
We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.
Original language | Undefined |
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Pages (from-to) | 2441-2443 |
Number of pages | 3 |
Journal | IEEE transactions on magnetics |
Volume | 38 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2002 |
Keywords
- TST-uSPAM: micro Scanning Probe Array Memory
- TSTNE-Probe-MFM: Magnetic Force Microscope
- TST-MFM: Magnetic Force Microscope
- EWI-5393
- SMI-EXP: EXPERIMENTAL TECHNIQUES
- magnetic tips
- METIS-208554
- IR-55657
- Cantilevers
- Magnetic force microscopy (MFM)
- Integration
- SMI-TST: From 2006 in EWI-TST