The CantiClever: A Dedicated Probe for Magnetic Force Microscopy

A.G. van den Bos, I.R. Heskamp, Iwan Heskamp, Martin Herman Siekman, Leon Abelmann, J.C. Lodder

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    Abstract

    We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.
    Original languageUndefined
    Pages (from-to)2441-2443
    Number of pages3
    JournalIEEE transactions on magnetics
    Volume38
    Issue number5
    DOIs
    Publication statusPublished - 2002

    Keywords

    • TST-uSPAM: micro Scanning Probe Array Memory
    • TSTNE-Probe-MFM: Magnetic Force Microscope
    • TST-MFM: Magnetic Force Microscope
    • EWI-5393
    • SMI-EXP: EXPERIMENTAL TECHNIQUES
    • magnetic tips
    • METIS-208554
    • IR-55657
    • Cantilevers
    • Magnetic force microscopy (MFM)
    • Integration
    • SMI-TST: From 2006 in EWI-TST

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