The CantiClever: A Dedicated Probe for Magnetic Force Microscopy

A.G. van den Bos; I.R. Heskamp; Iwan Heskamp; Martin Herman Siekman; Leon Abelmann; J.C. Lodder

doi:10.1109/TMAG.2002.803585

The CantiClever: A Dedicated Probe for Magnetic Force Microscopy

A.G. van den Bos, I.R. Heskamp, Iwan Heskamp, Martin Herman Siekman, Leon Abelmann, J.C. Lodder

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

Original language	Undefined
Pages (from-to)	2441-2443
Number of pages	3
Journal	IEEE transactions on magnetics
Volume	38
Issue number	5
DOIs	https://doi.org/10.1109/TMAG.2002.803585
Publication status	Published - 2002

Keywords

TST-uSPAM: micro Scanning Probe Array Memory
TSTNE-Probe-MFM: Magnetic Force Microscope
TST-MFM: Magnetic Force Microscope
EWI-5393
SMI-EXP: EXPERIMENTAL TECHNIQUES
magnetic tips
METIS-208554
IR-55657
Cantilevers
Magnetic force microscopy (MFM)
Integration
SMI-TST: From 2006 in EWI-TST

Access to Document

10.1109/TMAG.2002.803585

BOS2002
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Cite this

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title = "The CantiClever: A Dedicated Probe for Magnetic Force Microscopy",

abstract = "We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.",

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T1 - The CantiClever: A Dedicated Probe for Magnetic Force Microscopy

AU - van den Bos, A.G.

AU - Heskamp, I.R.

AU - Heskamp, Iwan

AU - Siekman, Martin Herman

AU - Abelmann, Leon

AU - Lodder, J.C.

N1 - Imported from SMI Reference manager

PY - 2002

Y1 - 2002

N2 - We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

AB - We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon microma-chining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TSTNE-Probe-MFM: Magnetic Force Microscope

KW - TST-MFM: Magnetic Force Microscope

KW - EWI-5393

KW - SMI-EXP: EXPERIMENTAL TECHNIQUES

KW - magnetic tips

KW - METIS-208554

KW - IR-55657

KW - Cantilevers

KW - Magnetic force microscopy (MFM)

KW - Integration

KW - SMI-TST: From 2006 in EWI-TST

U2 - 10.1109/TMAG.2002.803585

DO - 10.1109/TMAG.2002.803585

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EP - 2443

JO - IEEE transactions on magnetics

JF - IEEE transactions on magnetics

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