The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114669

    Cite this

    @misc{ebbccf957e4d4f87a9c5a13e31f01fac,
    title = "The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator",
    keywords = "METIS-114669",
    author = "Tas, {Niels Roelof} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and {ter Brake}, {Hermanus J.M.} and M.T. Blom",
    year = "1998",
    month = "6",
    day = "23",
    language = "Undefined",
    type = "Other",

    }

    TY - GEN

    T1 - The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

    AU - Tas, Niels Roelof

    AU - Gardeniers, Johannes G.E.

    AU - Elwenspoek, Michael Curt

    AU - ter Brake, Hermanus J.M.

    AU - Blom, M.T.

    PY - 1998/6/23

    Y1 - 1998/6/23

    KW - METIS-114669

    M3 - Other contribution

    CY - Enschede

    ER -