The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

Research output: Other contribution › Other research output

Keywords

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@misc{ebbccf957e4d4f87a9c5a13e31f01fac,

title = "The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator",

keywords = "METIS-114669",

author = "Tas, {Niels Roelof} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and {ter Brake}, {Hermanus J.M.} and M.T. Blom",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}