The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

Niels Roelof Tas; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Hermanus J.M. ter Brake; M.T. Blom

The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

Niels Roelof Tas
, Johannes G.E. Gardeniers
, Michael Curt Elwenspoek
, Hermanus J.M. ter Brake
, M.T. Blom

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 23 Jun 1998

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

METIS-114669

Cite this

@misc{ebbccf957e4d4f87a9c5a13e31f01fac,

title = "The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator",

keywords = "METIS-114669",

author = "Tas, \{Niels Roelof\} and Gardeniers, \{Johannes G.E.\} and Elwenspoek, \{Michael Curt\} and \{ter Brake\}, \{Hermanus J.M.\} and M.T. Blom",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}