The construction of orientation-dependent crystal growth and etch rate functions I: Mathematical and physical aspects

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Keywords

@article{ba212f3746364b148295dd9539e2db8d,

title = "The construction of orientation-dependent crystal growth and etch rate functions I: Mathematical and physical aspects",

keywords = "METIS-111722",

author = "\{van Suchtelen\}, J. and \{van Veenendaal\}, E.",

year = "2000",

language = "Undefined",

volume = "87",

pages = "8721--8731",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}