The dependence on plasma in pulsed laser deposition for the surface passivating quality of oxides on silicon

L.M. Doeswijk, A. Janssens, P. Laloli, Horst Rogalla, David H.A. Blank

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 15 Apr 2001
    EventMRS Spring Meeting 2001 - San Francisco, United States
    Duration: 15 Apr 200120 Apr 2001

    Conference

    ConferenceMRS Spring Meeting 2001
    CountryUnited States
    CitySan Francisco
    Period15/04/0120/04/01

    Keywords

    • METIS-200626

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