The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor

Hubertus J.M. Geijselaers, H. Tijdeman

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This paper gives an explanation of the dynamic mechanical behaviour of a resonating microbridge mass-flow sensor. A rise in the average temperature of the bridge initially results in a reduction of the resonance frequency. Upon further temperature rise, a reversal occurs and the resonance frequency starts rising too. The dynamic behaviour in this case is found to be governed by static buckling. This phenomenon is analysed, first using a finite-element model and then with an approximate analytical calculation.
Original languageUndefined
Pages (from-to)37-41
JournalSensors and actuators. A: Physical
Issue number1
Publication statusPublished - 1991


  • METIS-261204
  • IR-57547

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