The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor

  • H.J.M. Geijselaers
  • , H. Tijdeman

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)
198 Downloads (Pure)

Abstract

This paper gives an explanation of the dynamic mechanical behaviour of a resonating microbridge mass-flow sensor. A rise in the average temperature of the bridge initially results in a reduction of the resonance frequency. Upon further temperature rise, a reversal occurs and the resonance frequency starts rising too. The dynamic behaviour in this case is found to be governed by static buckling. This phenomenon is analysed, first using a finite-element model and then with an approximate analytical calculation.
Original languageEnglish
Pages (from-to)37-41
JournalSensors and Actuators A: Physical
Volume29
Issue number1
DOIs
Publication statusPublished - 1991

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