@article{2da2aeacf0384c5bbd4256fa80a47620,
title = "The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems",
keywords = "METIS-266574",
author = "S. Bruijn and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Andrey Yakshin and Frederik Bijkerk",
year = "2008",
doi = "10.4028/www.scientific.net/DDF.283-286.657",
language = "Undefined",
volume = "283-286",
pages = "657--661",
journal = "Defect and diffusion forum",
issn = "1012-0386",
publisher = "Trans Tech Publications Ltd",
}