The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
Original languageUndefined
Pages (from-to)657-661
JournalDefect and diffusion forum
Volume283-286
DOIs
Publication statusPublished - 2008

Keywords

  • METIS-266574

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