The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

Research output: Contribution to journal › Article › Academic › peer-review

15 Citations (Scopus)

43 Downloads (Pure)

Original language	English
Pages (from-to)	657-661
Journal	Defect and diffusion forum
Volume	283-286
DOIs	https://doi.org/10.4028/www.scientific.net/DDF.283-286.657
Publication status	Published - 2008

Keywords

@article{2da2aeacf0384c5bbd4256fa80a47620,

title = "The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems",

keywords = "2023 OA procedure",

author = "Saskia Bruijn and \{van de Kruijs\}, \{Robbert W.E.\} and Andrey Yakshin and Fred Bijkerk",

year = "2008",

doi = "10.4028/www.scientific.net/DDF.283-286.657",

language = "English",

volume = "283-286",

pages = "657--661",

journal = "Defect and diffusion forum",

issn = "1012-0386",

publisher = "Trans Tech Publications Ltd",

}

TY - JOUR

T1 - The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

AU - Bruijn, Saskia

AU - van de Kruijs, Robbert W.E.

AU - Yakshin, Andrey

AU - Bijkerk, Fred

PY - 2008

Y1 - 2008

KW - 2023 OA procedure

U2 - 10.4028/www.scientific.net/DDF.283-286.657

DO - 10.4028/www.scientific.net/DDF.283-286.657

M3 - Article

SN - 1012-0386

VL - 283-286

SP - 657

EP - 661

JO - Defect and diffusion forum

JF - Defect and diffusion forum

ER -