The change in microstructure in sputtered CoNi/Pt Multilayers is studied as a function of the argon pressure. It is shown that as the sputter gas pressure increases the average grain size approximately stays constant, but the grains become more separated, the argon content decreases and the films tend to grow with rougher interfaces. Furthermore the increase in argon pressure also seems to lead to an increase in interface anisotropy.
- SMI-TST: From 2006 in EWI-TST
- SMI-MAT: MATERIALS