The effect of sputter pressure on the microstrucure of CoNi/Pt multilayers

M.D. Bijker; D.M. Donnet; J.C. Lodder

doi:10.3379/jmsjmag.20.S1_407

The effect of sputter pressure on the microstrucure of CoNi/Pt multilayers

M.D. Bijker, D.M. Donnet, J.C. Lodder

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Abstract

The change in microstructure in sputtered CoNi/Pt Multilayers is studied as a function of the argon pressure. It is shown that as the sputter gas pressure increases the average grain size approximately stays constant, but the grains become more separated, the argon content decreases and the films tend to grow with rougher interfaces. Furthermore the increase in argon pressure also seems to lead to an increase in interface anisotropy.

Original language	English
Pages (from-to)	407-410
Number of pages	4
Journal	Journal of the Magnetics Society of Japan
Volume	20
Issue number	Suppl. 1
DOIs	https://doi.org/10.3379/jmsjmag.20.S1_407
Publication status	Published - 1996

Keywords

SMI-TST: From 2006 in EWI-TST
SMI-MAT: MATERIALS

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Bijker1996effectsFinal published version, 681 KB

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abstract = "The change in microstructure in sputtered CoNi/Pt Multilayers is studied as a function of the argon pressure. It is shown that as the sputter gas pressure increases the average grain size approximately stays constant, but the grains become more separated, the argon content decreases and the films tend to grow with rougher interfaces. Furthermore the increase in argon pressure also seems to lead to an increase in interface anisotropy.",

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AU - Bijker, M.D.

AU - Donnet, D.M.

AU - Lodder, J.C.

PY - 1996

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AB - The change in microstructure in sputtered CoNi/Pt Multilayers is studied as a function of the argon pressure. It is shown that as the sputter gas pressure increases the average grain size approximately stays constant, but the grains become more separated, the argon content decreases and the films tend to grow with rougher interfaces. Furthermore the increase in argon pressure also seems to lead to an increase in interface anisotropy.

KW - SMI-TST: From 2006 in EWI-TST

KW - SMI-MAT: MATERIALS

U2 - 10.3379/jmsjmag.20.S1_407

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M3 - Article

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EP - 410

JO - Journal of the Magnetics Society of Japan

JF - Journal of the Magnetics Society of Japan

IS - Suppl. 1

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The effect of sputter pressure on the microstrucure of CoNi/Pt multilayers

Abstract

Keywords

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