The effect of the buffer gas on the homogeneity of discharges in excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 7 Mar 2007
Event19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie - Lunteren
Duration: 7 Mar 20078 Mar 2007

Conference

Conference19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie
CityLunteren
Period7/03/078/03/07

Keywords

  • METIS-241490

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