The effect of the buffer gas on the homogeneity of discharges in excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 7 Mar 2007
Event	19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie - Lunteren Duration: 7 Mar 2007 → 8 Mar 2007

Conference	19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie
City	Lunteren
Period	7/03/07 → 8/03/07

Keywords

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title = "The effect of the buffer gas on the homogeneity of discharges in excimer laser gas mixtures",

keywords = "METIS-241490",

author = "D. Mathew and Bastiaens, \{Hubertus M.J.\} and Boller, \{Klaus J.\} and P.J.M. Peters",

year = "2007",

month = mar,

day = "7",

language = "Undefined",

pages = "--",

note = "19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie ; Conference date: 07-03-2007 Through 08-03-2007",

}

TY - CONF

T1 - The effect of the buffer gas on the homogeneity of discharges in excimer laser gas mixtures

AU - Mathew, D.

AU - Bastiaens, Hubertus M.J.

AU - Boller, Klaus J.

AU - Peters, P.J.M.

PY - 2007/3/7

Y1 - 2007/3/7

KW - METIS-241490

M3 - Poster

SP - -

T2 - 19th NNV/CPS Symposium Plasmafysica en Stralingstechnologie

Y2 - 7 March 2007 through 8 March 2007

ER -