TY - JOUR
T1 - The effect of thermal annealing on the properties of thin alumina films prepared by low pressure MOCVD
AU - Haanappel, V.A.C.
AU - van de Vendel, D.
AU - van Corbach, H.D.
AU - Fransen, T.
AU - Gellings, P.J.
PY - 1995
Y1 - 1995
N2 - Thin amorphous alumina films were prepared on stainless steel, type AISI 304, by low pressure metal-organic chemical vapour deposition. The effect of thermal annealing in nitrogen (for 2, 4 and 17 h at 600, 700 and 800 °C) on the film properties, including the protection of the underlying substrate against high temperature corrosion and the chemical composition of the film, were investigated.
Corrosion experiments performed at 450 °C in a hydrogen sulphide-containing gas, showed that the thermal annealing process had a detrimental effect on the protective properties of the alumina films. From FTIR and Auger measurements, it was found that the amorphous alumina, containing boehmite, converted to ¿-alumina during the annealing process.
AB - Thin amorphous alumina films were prepared on stainless steel, type AISI 304, by low pressure metal-organic chemical vapour deposition. The effect of thermal annealing in nitrogen (for 2, 4 and 17 h at 600, 700 and 800 °C) on the film properties, including the protection of the underlying substrate against high temperature corrosion and the chemical composition of the film, were investigated.
Corrosion experiments performed at 450 °C in a hydrogen sulphide-containing gas, showed that the thermal annealing process had a detrimental effect on the protective properties of the alumina films. From FTIR and Auger measurements, it was found that the amorphous alumina, containing boehmite, converted to ¿-alumina during the annealing process.
U2 - 10.1016/0040-6090(95)80026-3
DO - 10.1016/0040-6090(95)80026-3
M3 - Article
SN - 0040-6090
VL - 256
SP - 8
EP - 12
JO - Thin solid films
JF - Thin solid films
IS - 1-2
ER -