The electrical conduction and dielectric strength of SU-8

Joost Melai; Cora Salm; Sander M. Smits; Jan Visschers; Jurriaan Schmitz

doi:10.1088/0960-1317/19/6/065012

The electrical conduction and dielectric strength of SU-8

Joost Melai, Cora Salm, Sander M. Smits, Jan Visschers, Jurriaan Schmitz

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Abstract

This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications

Original language	English
Pages (from-to)	065012-065018
Number of pages	7
Journal	Journal of micromechanics and microengineering
Volume	19
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/19/6/065012
Publication status	Published - 25 May 2009

Keywords

SC-RID: Radiation Imaging detectors
2023 OA procedure

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10.1088/0960-1317/19/6/065012

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title = "The electrical conduction and dielectric strength of SU-8",

abstract = "This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications",

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AU - Salm, Cora

AU - Smits, Sander M.

AU - Visschers, Jan

AU - Schmitz, Jurriaan

PY - 2009/5/25

Y1 - 2009/5/25

N2 - This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications

AB - This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications

KW - SC-RID: Radiation Imaging detectors

KW - 2023 OA procedure

U2 - 10.1088/0960-1317/19/6/065012

DO - 10.1088/0960-1317/19/6/065012

M3 - Article

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VL - 19

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EP - 65018

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 6

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The electrical conduction and dielectric strength of SU-8

Abstract

Keywords

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