The electrical conduction and dielectric strength of SU-8

J. Melai, Cora Salm, Sander M. Smits, Jan Visschers, Jurriaan Schmitz

    Research output: Contribution to journalArticleAcademicpeer-review

    31 Citations (Scopus)

    Abstract

    This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications
    Original languageUndefined
    Pages (from-to)065012-065018
    Number of pages7
    JournalJournal of micromechanics and microengineering
    Volume19
    Issue number6
    DOIs
    Publication statusPublished - 25 May 2009

    Keywords

    • EWI-15371
    • SC-RID: Radiation Imaging detectors
    • IR-61330

    Cite this