The electrolysis of water: an actuation principle for MEMS with a big opportunity

C. Neagu, H. Jansen, H. Gardeniers, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationActuator 98
Subtitle of host publication6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany
EditorsHubert Borgmann
Place of PublicationBremen, Germany
PublisherMesse Bremen GmbH
Pages118-121
ISBN (Print)3-933339-00-6
Publication statusPublished - 17 Jun 1998
Event6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998 - Bremen, Germany
Duration: 17 Jun 199819 Jun 1998
Conference number: 8

Conference

Conference6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998
Abbreviated titleACTUATOR
CountryGermany
CityBremen
Period17/06/9819/06/98

Cite this

Neagu, C., Jansen, H., Gardeniers, H., & Elwenspoek, M. (1998). The electrolysis of water: an actuation principle for MEMS with a big opportunity. In H. Borgmann (Ed.), Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany (pp. 118-121). Bremen, Germany: Messe Bremen GmbH.