The electrolysis of water: an actuation principle for MEMS with a big opportunity

C. Neagu; H. Jansen; H. Gardeniers; M. Elwenspoek

The electrolysis of water: an actuation principle for MEMS with a big opportunity

C. Neagu, H. Jansen, H. Gardeniers, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Actuator 98
Subtitle of host publication	6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany
Editors	Hubert Borgmann
Place of Publication	Bremen, Germany
Publisher	Messe Bremen GmbH
Pages	118-121
ISBN (Print)	3-933339-00-6
Publication status	Published - 17 Jun 1998
Event	6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998 - Bremen, Germany Duration: 17 Jun 1998 → 19 Jun 1998 Conference number: 8

Conference

Conference	6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998
Abbreviated title	ACTUATOR
Country/Territory	Germany
City	Bremen
Period	17/06/98 → 19/06/98

Access to Document

https://www.tib.eu/en/search/id/BLCP%3ACN033436646/The-Electrolysis-of-Water-An-Actuation-Principle/

Cite this

Neagu, C., Jansen, H., Gardeniers, H., & Elwenspoek, M. (1998). The electrolysis of water: an actuation principle for MEMS with a big opportunity. In H. Borgmann (Ed.), Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany (pp. 118-121). Messe Bremen GmbH. https://www.tib.eu/en/search/id/BLCP%3ACN033436646/The-Electrolysis-of-Water-An-Actuation-Principle/

@inproceedings{c5f608aadf524ae4bafc084a06584680,

title = "The electrolysis of water: an actuation principle for MEMS with a big opportunity",

author = "C. Neagu and H. Jansen and H. Gardeniers and M. Elwenspoek",

year = "1998",

month = jun,

day = "17",

language = "English",

isbn = "3-933339-00-6",

pages = "118--121",

editor = "Hubert Borgmann",

booktitle = "Actuator 98",

publisher = "Messe Bremen GmbH",

address = "Germany",

note = "6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998, ACTUATOR ; Conference date: 17-06-1998 Through 19-06-1998",

}

Neagu, C, Jansen, H, Gardeniers, H & Elwenspoek, M 1998, The electrolysis of water: an actuation principle for MEMS with a big opportunity. in H Borgmann (ed.), Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. Messe Bremen GmbH, Bremen, Germany, pp. 118-121, 6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998, Bremen, Bremen, Germany, 17/06/98. <https://www.tib.eu/en/search/id/BLCP%3ACN033436646/The-Electrolysis-of-Water-An-Actuation-Principle/>

The electrolysis of water: an actuation principle for MEMS with a big opportunity. / Neagu, C.; Jansen, H.; Gardeniers, H. et al.
Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. ed. / Hubert Borgmann. Bremen, Germany: Messe Bremen GmbH, 1998. p. 118-121.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - The electrolysis of water

T2 - 6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998

AU - Neagu, C.

AU - Jansen, H.

AU - Gardeniers, H.

AU - Elwenspoek, M.

N1 - Conference code: 8

PY - 1998/6/17

Y1 - 1998/6/17

M3 - Conference contribution

SN - 3-933339-00-6

SP - 118

EP - 121

BT - Actuator 98

A2 - Borgmann, Hubert

PB - Messe Bremen GmbH

CY - Bremen, Germany

Y2 - 17 June 1998 through 19 June 1998

ER -