The electrolysis of water: An actuation principle for MEMS with a big opportunity

C.R. Rusu, Cristina Neagu, Henricus V. Jansen, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

62 Citations (Scopus)

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Engineering & Materials Science