The electrostatic shuffle motor

Niels Roelof Tas, R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMicromechanics Europe Workshop 1995
    Pages128-131
    Publication statusPublished - 4 Sep 1995
    Event6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark
    Duration: 3 Sep 19955 Sep 1995
    Conference number: 6

    Conference

    Conference6th Micromechanics Europe Workshop, MME 1995
    Abbreviated titleMME
    CountryDenmark
    CityCopenhagen
    Period3/09/955/09/95

    Keywords

    • METIS-114109
    • IR-17214

    Cite this

    Tas, N. R., Legtenberg, R., Berenschot, J. W., Elwenspoek, M. C., & Fluitman, J. H. J. (1995). The electrostatic shuffle motor. In Micromechanics Europe Workshop 1995 (pp. 128-131)